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1

Hysteresis and process stability in reactive high power impulse magnetron sputtering of metal oxides

Montri Aiempanakit, Tomáš Kubart, Petter Larsson, Kostas Sarakinos, Jens Jensen, Ulf Helmersson

Journal:

Thin Solid Films

Year:

2011

Language:

english

File:

PDF, 1.04 MB

english, 2011

2

Reactive sputtering of precursors for Cu2ZnSnS4 thin film solar cells

Tove Ericson, Tomas Kubart, Jonathan J. Scragg, Charlotte Platzer-Björkman

Journal:

Thin Solid Films

Year:

2012

Language:

english

File:

PDF, 1.19 MB

english, 2012

3

Annealing behavior of reactively sputtered precursor films for Cu2ZnSnS4 solar cells

Ericson, Tove, Scragg, Jonathan J., Kubart, Tomas, Törndahl, Tobias, Platzer-Björkman, Charlotte

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 876 KB

english, 2013

4

Reactively sputtered films in the CuxS–ZnS–SnSy system: From metastability to equilibrium

Ren, Yi, Scragg, Jonathan J., Ericson, Tove, Kubart, Tomas, Platzer-Björkman, Charlotte

Journal:

Thin Solid Films

Year:

2015

Language:

english

File:

PDF, 3.58 MB

english, 2015

5

Ultrafast Dye Regeneration in a Core-Shell NiO-Dye-TiO2 Mesoporous Film

Tian, Lei, Föhlinger, Jens, Pati, Palas Baran, Zhang, Zhibin, Lin, Junzhong, Yang, Wenxing, Johansson, Malin Birgitta, Kubart, Tomas, Sun, Junliang, Boschloo, Gerrit, Hammarstrom, Leif, Tian, Haining

Journal:

Physical Chemistry Chemical Physics

Year:

2017

Language:

english

File:

PDF, 1.17 MB

english, 2017

6

High Power Impulse Magnetron Sputtering || Reactive high power impulse magnetron sputtering

Kubart, Tomáš

Year:

2020

Language:

english

File:

PDF, 2.34 MB

english, 2020

7

The chalcogenide perovskite BaZrS3: Thin film growth by sputtering and rapid thermal processing

Comparotto, Corrado, Davydova, Alexandra, Ericson, Tove, Riekehr, Lars, Moro, Marcos, Kubart, Tomas, Scragg, Jonathan J. S.

Journal:

ACS Applied Energy Materials

Year:

2020

File:

PDF, 1.48 MB

2020

8

Modelling of Magnetron Sputtering of Tungsten Oxide with Reactive Gas Pulsing

Tomáš Kubart, Tomáš Polcar, Oliver Kappertz, Nuno Parreira, Tomas Nyberg, Sören Berg, Albano Cavaleiro

Journal:

Plasma Processes and Polymers

Year:

2007

Language:

english

File:

PDF, 361 KB

english, 2007

9

Effect of peak power in reactive high power impulse magnetron sputtering of titanium dioxide

Montri Aiempanakit, Ulf Helmersson, Asim Aijaz, Petter Larsson, Roger Magnusson, Jens Jensen, Tomáš Kubart

Journal:

Surface and Coatings Technology

Year:

2011

Language:

english

File:

PDF, 499 KB

english, 2011

10

Rapid annealing of reactively sputtered precursors for Cu2ZnSnS4 solar cells

Jonathan J. Scragg, Tove Ericson, Xavier Fontané, Victor Izquierdo-Roca, Alejandro Pérez-Rodríguez, Tomas Kubart, Marika Edoff, Charlotte Platzer-Björkman

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2012

Language:

english

File:

PDF, 327 KB

english, 2012

11

A Detrimental Reaction at the Molybdenum Back Contact in Cu 2 ZnSn(S,Se) 4 Thin-Film Solar Cells

Scragg, Jonathan J., Wätjen, J. Timo, Edoff, Marika, Ericson, Tove, Kubart, Tomas, Platzer-Björkman, Charlotte

Journal:

Journal of the American Chemical Society

Year:

2012

Language:

english

File:

PDF, 240 KB

english, 2012

12

Understanding the discharge current behavior in reactive high power impulse magnetron sputtering of oxides

Aiempanakit, Montri, Aijaz, Asim, Lundin, Daniel, Helmersson, Ulf, Kubart, Tomáš

Journal:

Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 1.69 MB

english, 2013

13

Chemical Insights into the Instability of Cu 2 ZnSnS 4 Films during Annealing

Scragg, Jonathan J., Ericson, Tove, Kubart, Tomas, Edoff, Marika, Platzer-Björkman, Charlotte

Journal:

Chemistry of Materials

Year:

2011

Language:

english

File:

PDF, 1.26 MB

english, 2011

14

Effects of Back Contact Instability on Cu 2 ZnSnS 4 Devices and Processes

Scragg, Jonathan J., Kubart, Tomas, Wätjen, J. Timo, Ericson, Tove, Linnarsson, Margareta K., Platzer-Björkman, Charlotte

Journal:

Chemistry of Materials

Year:

2013

Language:

english

File:

PDF, 1.53 MB

english, 2013

15

Influence of Ti addition on the structure and properties of low-friction W–S–C coatings

Sundberg, Jill, Nyberg, Harald, Särhammar, Erik, Gustavsson, Fredrik, Kubart, Tomas, Nyberg, Tomas, Jacobson, Staffan, Jansson, Ulf

Journal:

Surface and Coatings Technology

Year:

2013

Language:

english

File:

PDF, 1.39 MB

english, 2013

16

Modelling of target effects in reactive HIPIMS

Kubart, Tomas, Andersson, Joakim

Journal:

IOP Conference Series Materials Science and Engineering

Year:

2012

Language:

english

File:

PDF, 663 KB

english, 2012

17

Investigation of ionized metal flux fraction in HiPIMS discharges with Ti and Ni targets

Kubart, Tomáš, Čada, Martin, Lundin, Daniel, Hubička, Zdeněk

Journal:

Surface and Coatings Technology

Year:

2014

Language:

english

File:

PDF, 1.48 MB

english, 2014

18

HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis

Surpi, Alessandro, Kubart, Tomas, Giordani, Diego, Tosello, Martino, Mattei, Giovanni, Colasuonno, Marino, Patelli, Alessandro

Journal:

Surface and Coatings Technology

Year:

2013

Language:

english

File:

PDF, 837 KB

english, 2013

19

Phase formation and morphological stability of ultrathin Ni-Co-Pt silicide films formed on Si(100)

Xu, Peng, Kubart, Tomas, Gao, Xindong, Wu, Dongping, Zhang, Shi-Li

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2014

Language:

english

File:

PDF, 1.19 MB

english, 2014

20

Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering

Schmidt, Rüdiger M., Ries, Patrick, Pflug, Andreas, Wuttig, Matthias, Kubart, Tomas

Journal:

Surface and Coatings Technology

Year:

2014

Language:

english

File:

PDF, 455 KB

english, 2014

21

Reactive sputtering of Cu2ZnSnS4 thin films — Target effects on the deposition process stability

Kubart, Tomáš, Ericson, Tove, Scragg, Jonathan J., Edoff, Marika, Platzer-Björkman, Charlotte

Journal:

Surface and Coatings Technology

Year:

2014

Language:

english

File:

PDF, 565 KB

english, 2014

22

[IEEE 2011 IEEE International Ultrasonics Symposium (IUS) - Orlando, FL, USA (2011.10.18-2011.10.21)] 2011 IEEE International Ultrasonics Symposium - Synthesis of c-tilted AlN films with a good tilt and thickness uniformity

Moreria, Milena, Bjurstrom, Johan, Kubart, Tomas, Kuzavas, Bjorn, Katardjiev, Ilia

Year:

2011

Language:

english

File:

PDF, 1.18 MB

english, 2011

23

Conformal Ni-silicide formation over three-dimensional device structures

Zhu, Zhiwei, Gao, Xindong, Kubart, Tomas, Zhang, Zhi-Bin, Wu, Dongping, Zhang, Shi-Li

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 1.10 MB

english, 2012

24

Deposition of highly textured AlN thin films by reactive high power impulse magnetron sputtering

Moreira, Milena A., Törndahl, Tobias, Katardjiev, Ilia, Kubart, Tomas

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2015

Language:

english

File:

PDF, 3.78 MB

english, 2015

25

Epitaxy of Ultrathin NiSi2 Films with Predetermined Thickness

Gao, Xindong, Andersson, Joakim, Kubart, Tomas, Nyberg, Tomas, Smith, Ulf, Lu, Jun, Hultman, Lars, Kellock, Andrew J., Zhang, Zhen, Lavoie, Christian, Zhang, Shi-Li

Journal:

Electrochemical and Solid-State Letters

Year:

2011

Language:

english

File:

PDF, 524 KB

english, 2011

26

Low-temperature synthesis of thermochromic vanadium dioxide thin films by reactive high power impulse magnetron sputtering

Aijaz, Asim, Ji, Yu-Xia, Montero, José, Niklasson, Gunnar A., Granqvist, Claes G., Kubart, Tomáš

Journal:

Solar Energy Materials and Solar Cells

Year:

2016

Language:

english

File:

PDF, 2.47 MB

english, 2016

27

E-MRS 2015 Symposium EE: Protective coatings and thin films

Pierson, Jean-François, Čekada, Miha, Kubart, Tomas, Sanjines, Rosendo

Journal:

Surface and Coatings Technology

Year:

2016

Language:

english

File:

PDF, 124 KB

english, 2016

28

Broadband Optical Absorption caused by Plasmonic Response of Coalesced Au Nanoparticles Embedded in a TiO2 Matrix

Borges, Joel, M. S. Pereira, Rui Miguel, S. Rodrigues, Marco Sampaio, Kubart, Tomas, Manjeshwar Sathyanath, Sharath Kumar, Leifer, Klaus, Cavaleiro, Albano, Polcar, Tomaš, Vasilevskiy, Mikhail I., Vaz

Journal:

The Journal of Physical Chemistry C

Year:

2016

Language:

english

File:

PDF, 5.48 MB

english, 2016

29

Direct comparison of atomic layer deposition and sputtering of In2O3:H used as transparent conductive oxide layer in CuIn1−xGaxSe2 thin film solar cells

Keller, Jan, Aijaz, Asim, Gustavsson, Fredrik, Kubart, Tomas, Stolt, Lars, Edoff, Marika, Törndahl, Tobias

Journal:

Solar Energy Materials and Solar Cells

Year:

2016

Language:

english

File:

PDF, 1.26 MB

english, 2016

30

Synthesis of hydrogenated diamondlike carbon thin films using neon–acetylene based high power impulse magnetron sputtering discharges

Aijaz, Asim, Louring, Sascha, Lundin, Daniel, Kubart, Tomáš, Jensen, Jens, Sarakinos, Kostas, Helmersson, Ulf

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2016

Language:

english

File:

PDF, 793 KB

english, 2016

31

Formation of nickel germanides from Ni layers with thickness below 10 nm

Jablonka, Lukas, Kubart, Tomas, Primetzhofer, Daniel, Abedin, Ahmad, Hellström, Per-Erik, Östling, Mikael, Jordan-Sweet, Jean, Lavoie, Christian, Zhang, Shi-Li, Zhang, Zhen

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2017

Language:

english

File:

PDF, 1.23 MB

english, 2017

32

Effect of KF absorber treatment on the functionality of different transparent conductive oxide layers in CIGSe solar cells

Keller, Jan, Chalvet, Francis, Joel, Jonathan, Aijaz, Asim, Kubart, Tomas, Riekehr, Lars, Edoff, Marika, Stolt, Lars, Törndahl, Tobias

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2017

Language:

english

File:

PDF, 1.35 MB

english, 2017

33

Ion induced stress relaxation in dense sputter-deposited DLC thin films

Aijaz, Asim, Kubart, Tomas

Journal:

Applied Physics Letters

Year:

2017

Language:

english

File:

PDF, 729 KB

english, 2017

34

Hard and dense diamond like carbon coatings deposited by deep oscillations magnetron sputtering

Ferreira, Fábio, Aijaz, Asim, Kubart, Tomas, Cavaleiro, Albano, Oliveira, João

Journal:

Surface and Coatings Technology

Year:

2017

Language:

english

File:

PDF, 926 KB

english, 2017

35

Using hydrogen-doped In 2 O 3 films as a transparent back contact in (Ag,Cu)(In,Ga)Se 2 solar cells

Keller, Jan, Shariati Nilsson, Nina, Aijaz, Asim, Riekehr, Lars, Kubart, Tomas, Edoff, Marika, Törndahl, Tobias

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2018

Language:

english

File:

PDF, 1.73 MB

english, 2018

36

Discharge runaway in high power impulse magnetron sputtering of carbon: the effect of gas pressure, composition and target peak voltage

Vitelaru, Catalin, Aijaz, Asim, Parau, Anca Constantina, Kiss, Adrian E, Sobetkii, Arcadie, Kubart, Tomas

Journal:

Journal of Physics D Applied Physics

Year:

2018

Language:

english

File:

PDF, 1.08 MB

english, 2018

37

Solid State p-Type Dye Sensitized NiO-dye-TiO2 Core-Shell Solar Cells

Tian, Lei, Föhlinger, Jens, Zhang, Zhibin, Pati, Palas Baran, Lin, Junzhong, Kubart, Tomas, Hua, Yong, Sun, Junliang, Kloo, Lars, Boschloo, Gerrit, Hammarstrom, Leif, Tian, Haining

Journal:

Chemical Communications

Year:

2018

Language:

english

File:

PDF, 1.87 MB

english, 2018

38

Bifacial Cu(In,Ga)Se 2 solar cells using hydrogen-doped In 2 O 3 films as a transparent back contact

Keller, Jan, Chen, Wei-Chao, Riekehr, Lars, Kubart, Tomas, Törndahl, Tobias, Edoff, Marika

Journal:

Progress in Photovoltaics: Research and Applications

Year:

2018

Language:

english

File:

PDF, 1.38 MB

english, 2018

39

Mechanical Properties of Hydrogen Free Diamond-Like Carbon Thin Films Deposited by High Power Impulse Magnetron Sputtering with Ne

Aijaz, Asim, Ferreira, Fabio, Oliveira, Joao, Kubart, Tomas

Journal:

Year:

2018

Language:

english

File:

PDF, 4.11 MB

english, 2018

40

Correction: Ultrafast dye regeneration in a core–shell NiO–dye–TiO 2 mesoporous film

Tian, Lei, Föhlinger, Jens, Pati, Palas Baran, Zhang, Zhibin, Lin, Junzhong, Yang, Wenxing, Johansson, Malin, Kubart, Tomas, Sun, Junliang, Boschloo, Gerrit, Hammarström, Leif, Tian, Haining

Journal:

Physical Chemistry Chemical Physics

Year:

2018

Language:

english

File:

PDF, 1.41 MB

english, 2018

41

Back and front contacts in kesterite solar cells: State-of-the-art and open questions

Platzer-Björkman, Charlotte, Barreau, Nicolas, Bär, Marcus, Choubrac, Leo, Grenet, Louis, Heo, Jaeyeong, Kubart, Tomas, Mittiga, Alberto, Sánchez, Yudania, Scragg, Jonathan J, Sinha, Soumyadeep, Valen

Journal:

Journal of Physics: Energy

Year:

2019

Language:

english

File:

PDF, 1.09 MB

english, 2019

42

Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells

Tian, Lei, Torndahl, Tobias, Lin, Junzhong, Pati, Palas Baran, Zhang, Zhi-Bin, Kubart, Tomas, Hao, Yan, Sun, Junliang, Boschloo, Gerrit, Tian, Haining

Journal:

The Journal of Physical Chemistry C

Year:

2019

Language:

english

File:

PDF, 954 KB

english, 2019

43

Mechanistic Insights into Solid-State p-Type Dye-Sensitized Solar Cells

Tian, Lei, Torndahl, Tobias, Lin, Junzhong, Pati, Palas Baran, Zhang, Zhi-Bin, Kubart, Tomas, Hao, Yan, Sun, Junliang, Boschloo, Gerrit, Tian, Haining

Journal:

The Journal of Physical Chemistry C

Year:

2019

File:

PDF, 954 KB

2019

44

Room Temperature Reactive Deposition of InGaZnO and ZnSnO Amorphous Oxide Semiconductors for Flexible Electronics

Prušáková, Lucie, Hubík, Pavel, Aijaz, Asim, Nyberg, Tomas, Kubart, Tomas

Journal:

Year:

2019

File:

PDF, 1.02 MB

2019

45

A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings

Vitelaru, Catalin, Parau, Anca Constantina, Constantin, Lidia Ruxandra, Kiss, Adrian Emil, Vladescu, Alina, Sobetkii, Arcadie, Kubart, Tomas

Journal:

Year:

2020

File:

PDF, 2.99 MB

2020

46

Tailoring residual stresses in CrNx films on alumina and silicon deposited by high-power impulse magnetron sputtering

Elo, Robin, Jacobson, Staffan, Kubart, Tomas

Journal:

Surface and Coatings Technology

Year:

2020

File:

PDF, 1.23 MB

2020

47

High power impulse magnetron sputtering of diamond-like carbon coatings

Kubart, Tomas, Aijaz, Asim, Andersson, Joakim, Ferreira, Fabio, Oliveira, JoÃ£o Carlos, Sobetkii, Arcadie, Parau, Anca Constantina, Vitelaru, Catalin

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 2.68 MB

2020

48

Correlation between Substrate Ion Fluxes and the Properties of Diamond-Like Carbon Films Deposited by Deep Oscillation Magnetron Sputtering in Ar and Ar + Ne Plasmas

Oliveira, JoÃ£o, Ferreira, FÃ¡bio, Serra, Ricardo, Kubart, Tomas, Vitelaru, Catalin, Cavaleiro, Albano

Journal:

Year:

2020

File:

PDF, 3.01 MB

2020